The 65h JSAP Spring Meeting, 2018

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6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[19p-C104-1~19] 6.1 Ferroelectric thin films

Mon. Mar 19, 2018 1:15 PM - 6:30 PM C104 (52-104)

Tomoaki Yamada(Nagoya Univ.), Yoshiomi Hiranaga(Tohoku Univ.), Ken-ichi Mimura(AIST)

1:45 PM - 2:00 PM

[19p-C104-3] Observation of growing process of Hafnium oxide based epitaxial thin films on (001) Si substrate for the structual control

〇Daiki Kamada1, Kenshi Takada1, Daisuke Kiriya1, Takeshi Yoshimura1, Atsushi Ashida1, Norifumi Fujimura1 (1.Osaka Pref. univ.)

Keywords:HfO2