[19p-C202-1~17] 17.3 Layered materials

△ [19p-C202-5] Amplitude control of cantilevered MoS₂ by electrostatic force

〇Daiki Yoshikawa¹, Yuga Miyamoto¹, Kuniharu Takei¹, Takayuki Arie¹, Seiji Akita¹ (1.Osaka Pref. Univ.)

Keywords:mechanical resonator

In the measurement method using the conventional photothermal induction method, resonance characteristics are largely affected by the influence of the excitation light. In this study, we developed a cantilever MoS2-NEMS developed on a planar substrate and perform electrostatic drive with electrostatic attractive force superimposed with alternate bias (VAC) and direct current bias (VDC), so that influence of excitation light The control of the resonance characteristics in a state excluding the above condition was investigated.