[19p-F206-1~10] 6.2 Carbon-based thin films

[19p-F206-10] SXES-SEM study of amorphous carbon nitride films under visible light illumination

〇Masami Aono¹, Hiroshi Abe¹, Shingo Ishii², Yohei Sato², Masami Terauchi² (1.MSE, NDA, 2.IMRAM Tohoku Univ.)

Keywords:amorphous carbon nitride, photoinduced deformation, SXES

Amorphous carbon nitride films have been observed photoinduced deformation which is a deformation of the films by visible-light irradiation. Photoinduced deformation and photoconductivity in amorphous carbon nitride films shows an opposite trend in relation to the deposition temperature. In this study, we investigated electrical states under visible light illumination of amorphous carbon nitride films using SXES-SEM.