[19p-F206-1~10] 6.2 Carbon-based thin films

△ [19p-F206-7] Raman Spectrometry of Hydrogen-Free and Hydrogenated DLC Films by Using Ultraviolet, Green, and Near-Infrared Lasers

〇Satoshi Degai¹, Toru Harigai¹, Tsuyoshi Tanimoto¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Hidenobu Gonda², Masao Kamiya³, Makoto Taki⁴ (1.Toyohashi Univ. Technol., 2.OSG Coat.Service Co., Ltd., 3.Itoh Opt. Ind. Co., Ltd., 4.Onward Ceram. Coat. Co., Ltd.)

Keywords:DLC, Raman spectrometry

The diamond-like carbon (DLC) film is roughly divided into four types, hydrogen-free ta-C film and a-C film, hydrogen-containing ta-C: H film and a-C:H film. In the Raman spectroscopic analysis which is the main film evaluation method of DLC, the peak position of the Raman spectrum is changed by changing the laser wavelength. In this study, attempts were made to characterize each DLC from Raman spectra when using lasers with ultraviolet (324 nm), green (532 nm), and near infrared (785 nm) wavelengths. As a result, the characteristics due to the film quality and composition of DLC could be confirmed for each laser wavelength.