[19p-F206-1~10] 6.2 Carbon-based thin films

[19p-F206-6] Infrared optical constant determination of a-C:H film with variable angle FT-IR reflection spectrometer

〇Yusuke Kondo¹, Ayako Hioki¹, Yoshiharu Kakehi¹, Kazuo Satoh¹, Yong-Gu Shim² (1.ORIST, 2.Osaka Pref. Univ.)

Keywords:Diamond Like Carbon, Plasma-Enhanced Chemical Vapor Deposition, Fourier Transform Infrared Spectroscopy