[19p-P11-1~31] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[19p-P11-1] Film thickness dependence on structural and electrical properties of Sb doped SnO₂ thin films prepared by metal organic decomposition method

〇Tasuku Kawasaki¹, Junji Sawahata¹ (1.Nat. Inst. of Tech., Ibaraki Col.)

Keywords:SnO2, MOD