[19p-P11-1~31] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[19p-P11-4] Plasma-assisted deposition of the Ga-doped ZnO TCF by using a roll-to-roll method

〇Tsutomu Muranaka¹, Yuhei Tsuchiya¹, Moriaki Sakakibara¹, Norio Onojima¹, Yoichi Nabetani¹, Takashi Matsumoto¹, Satoshi Hiraki², Hiroshi Kono³, Kazuhiro Kijima³, Chiaki Yoshimura³, Shigeru Hagihara³ (1.Univ. of Yamanashi, 2.Nakaya Corp., 3.Yamanashi Industrial Tech. Ctr.)

Keywords:transparent conductive film, GZO, roll to roll

In this study, the Ga-doped ZnO (GZO) films on polyethylene terephthalate (PET) sheets by using plasma-assisted deposition and roll-to-roll method were carefully characterized to investigate the structural, electrical and optical properties of the GZO films.