[19p-P4-1~15] 6.2 Carbon-based thin films

[19p-P4-9] Electrical Conduction of Hydrogenated Amorphous Carbon Under Compression

〇(BC)Takahiro Suzuki¹, Shuji Obata¹, Akihiko Homma¹, Kenji Hirakuri¹, Yasuharu Ohgoe¹ (1.Tokyo Denki Univ)

Keywords:amorphous carbon film, electric conduction behavior

The electrical resistance values of graphite, carna nanotube, and carvan black show higher values under compression, than graphite. In the case of graphite powder, the influence of hysteresis due to this behavior is large, which is a problem as an electronic device. In this study, in this study, for the DLC film which can reduce the influence by hysteresis from the high film strength due to the amorphous structure including the graphite component, the electric conduction induction under compression was evaluated.