Epitaxial synthesis and dielectric property measurement on &epsilon;-Ga<sub>2</sub>O<sub>3</sub>

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

Mon. Mar 19, 2018 1:30 PM - 3:30 PM P5 (P)

1:30 PM - 3:30 PM

〇Subaru Yusa¹, Daichi Oka¹, Tomoteru Fukumura^1,2,3 (1.Tohoku Univ., 2.WPI-AIMR, Tohoku Univ., 3.CSRN, Tohoku Univ.)

Keywords:Gallium Oxide, MistCVD, Epitaxial Thin film