[19p-P5-1~39] 6.3 Oxide electronics

[19p-P5-7] Optical properties of VO₂ films on ZnO/glass with reduced transition temperature by rf substrate bias sputtering

〇Hiroaki Hoshino¹, Tatsuro Fukuzumi¹, Kenta Sato¹, Kunio Okimura¹, Iwao Yamaguchi², Tetsuo Tsuchiya² (1.Tokai Univ., 2.AIST)

Keywords:VO2, ZnO, Sputtering method

Vanadium dioxide changes light transmittance in the infrared light region at near 68℃. It is expected to be applied to smart windows. However, the high transition temperature is one barrier to practical use. We have succeeded in lowering the transition temperature of VO2 films on ZnO/glass by substrate bias sputtering method. In the presentation, we will present about its optical characteristics.