The 65h JSAP Spring Meeting, 2018

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[19p-P6-1~17] 6.4 Thin films and New materials

Mon. Mar 19, 2018 1:30 PM - 3:30 PM P6 (P)

1:30 PM - 3:30 PM

[19p-P6-13] Structure and electron mobility of ScN films grown on r-face sapphire substrates

〇Takeshi Ohgaki1, Isao Sakaguchi1, Naoki Ohashi1, Hajime Haneda1 (1.NIMS)

Keywords:semiconductor, thin film, nitride