Electrical Characteristics and Microstructure for MoSi<sub>2</sub>-Si Composite Thin Films Deposited by RF Magnetron Sputtering

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

Mon. Mar 19, 2018 1:30 PM - 3:30 PM P6 (P)

1:30 PM - 3:30 PM

〇Shungo Tanimoto¹, Yuuki Sato¹, Tadashi Ohachi¹, Shinzo Yoshikado¹ (1.Doshisha Univ.)

Keywords:MoSi2-Si Composite Thin Films