[20a-B303-1~11] 7.2 Applications and technologies of electron beams

[20a-B303-7] Improvement of a number of active tips and emission measurements from individual tips in volcano-structured Spindt-type field emitter arrays

Kodai Taguchi^1,2, Hidetoshi Shinya¹, 〇Hidekazu Murata¹, Eiji Rokuta¹, Hiroshi Shimoyama¹, Masayoshi Nagao², Katsuhisa Murakami² (1.Meijo Univ., 2.AIST)

Keywords:Field Emitter Array, PEEM, Opearation rate

We have developed an electron optical instrument for evaluation of multi emitters. The instrument is a versatile emission microscope and is capable of operating as SEEM, PEEM and FEEM imaging modes. In this study, volcano-structured Spindt-type field emitter arrays are observed in PEEM and FEEM modes using the instrument. In addition, emission current measurement from individual active tips in field emitter arrays is performed. As a result, we have found that there are large differences in emission current among active tips, and that a number of active tips is greatly improved by aging the field emitter arrays at a relatively higher voltage (V_G = 100 V).