The 65h JSAP Spring Meeting, 2018

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7 Beam Technology and Nanofabrication » 7.5 Ion beams

[20a-B403-1~10] 7.5 Ion beams

Tue. Mar 20, 2018 9:00 AM - 11:45 AM B403 (53-403)

Toshio Seki(Kyoto Univ.), Junichi Yanagisawa(Univ. of Shiga Pref.)

9:15 AM - 9:30 AM

△ [20a-B403-2] Polarity inverted ScAlN piezoelectric films for application to transformer in rectenna

〇(M1)Rei Karasawa1,3, Takahiko Yanagitani1,2,3 (1.Waseda Univ., 2.PST PRESTO, 3.ZAIKEN)

Keywords:ScAlN, Piezoelectric Transformer, Rectenna