10:30 AM - 10:45 AM
[20a-B403-6] Fabrication of 3D structure by double-angled etching with reactive gas cluster injection
Keywords:cluster, neutral beam, etching
Oral presentation
7 Beam Technology and Nanofabrication » 7.5 Ion beams
Tue. Mar 20, 2018 9:00 AM - 11:45 AM B403 (53-403)
Toshio Seki(Kyoto Univ.), Junichi Yanagisawa(Univ. of Shiga Pref.)
10:30 AM - 10:45 AM
Keywords:cluster, neutral beam, etching