[20a-C204-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

△ [20a-C204-12] Formation of ZnO nano particles by laser-assisted sputtering

〇Wataru Wakaki¹, Akio Sanpei¹, Noriyuki Hasuike¹, Susumu Kamoi² (1.Kyoto Inst. Tech., 2.Kyoto Res. Park)

Keywords:ZnO, Laser assisted sputtering, nano particles

In this study, we succeeded in producing ZnO nanoparticles on ZnO thin film by using 532 nm green laser during RF sputtering of ZnO. The structure which is not usually seen by RF sputtering of the opposite electrode plate at 13.56 MHz was analyzed by SEM or AFM, and the average particle diameter of nanoparticles is 26 nm, and the number of particles is about 27/μm².