[20a-C204-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

△ [20a-C204-8] Removal of DLC Films by Using Plasma Generated by Two Power Supplies

〇Yuki Kondo¹, Tsuyoshi Tanimoto¹, Toru Harigai¹, Fuminori Yoda¹, Satoshi Degai¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Hidenobu Gonda², Yasuhiro Hadano³, Masao Kamiya⁴ (1.Toyohashi Univ. Technol., 2.OSG Coat. Service Co., Ltd., 3.Kojima Ind. Corp., 4.Itoh Opt. Ind. Co., Ltd.)

Keywords:etching, Ashing, DLC

Diamond-like carbon (DLC) membranes are applied as protective films for tools and molds. In consideration of cost and environment, there is a demand to remove the DLC protective film of used tool or coating which failed to be coated and to reuse the base metal. However, according to the conventional method, it is difficult to remove DLC, and it takes time. In this study, we tried to remove the DLC film by using oxygen plasma generated by using two power sources.