[20a-D103-1~11] 15.6 Group IV Compound Semiconductors (SiC)

[20a-D103-1] High-Temperature Reliability of Ni/Nb Ohmic Contacts on 4H-SiC For Harsh Environment Applications

〇(D)Cuong Van Vuong¹, Ishikawa Seiji^1,2, Sezaki Hiroshi^1,2, Maeda Tomonori^1,2, Koganezawa Tomoyuki³, Ohshima Takeshi³, Miyazaki Takamichi⁴, Kuroki Shin-Ichiro¹ (1.RNBS, 2.Phenitec Semicon., 3.JASRI, 4.Tohoku Univ.)

Keywords:semiconductor, SiC