Synchrotron X-ray Topography Observation of Defects in HVPE-Grown Epitaxial Film of β-Ga<sub>2</sub>O<sub>3</sub>

Presentation information

Oral presentation

21 Joint Session K » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Tue. Mar 20, 2018 9:00 AM - 11:30 AM E201 (57-201)

9:00 AM - 9:15 AM

〇Satoshi Masuya¹, Kohei Sasaki^2,3, Akito Kuramata^2,3, Osamu Ueda⁴ (1.Saga Univ., 2.Novel Crystal Tech., 3.Tamura Corp., 4.Kanazawa Inst. Tech.)

Keywords:Ga2O3, X-ray topography