[20a-P5-1~11] 6.1 Ferroelectric thin films

[20a-P5-3] Fabrication and characterization of Ru-O based conductive oxide thin film

〇Kenshin Narisawa¹, Takanori Takahashi¹, Masahito Yamaguchi¹, Kiyoshi Uchiyama¹ (1.National Institute of Technology, Tsuruoka College)

Keywords:oxide electrode, RuO2