[20a-P7-1~37] 12.1 Fabrications and Structure Controls

[20a-P7-8] Metal atom deposition characteristics on polymer surface with low-Tg

〇(M1C)Riku Ou¹, Saki Matsumoto¹, Masatoshi Miyata¹, Tsuyoshi Tsujioka¹ (1.Osaka Kyoiku Univ.)

Keywords:polydimethylsiloxane, vacuum evaporation, glass transition temperature

We have reported metal desorption phenomenon on a low glass transition temperature (T_g) oily-polymer surface. Metal atoms on the low-T_g polymer surface are influenced by active surface-molecular motion and easy to desorb. This phenomenon can be applied to cathode pattern fabrication of organic devices and to high-efficiency metal-vapor integration. In this study, we investigated the cure-level dependence of metal deposition using curable polydimethylsiloxane (PDMS). As a result, we found that metal-vapor atoms were more likely to be deposited on the elastic film than the oily film despite the same T_g.