[20p-E201-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[20p-E201-1] Intensity Changes of Blue Luminescence in N-doped β-Ga₂O₃ Epitaxial Films

〇Takeyoshi Onuma^1,2, Yoshiaki Nakata², Kohei Sasaki^3,2, Tatekazu Masui³, Tomohiro Yamaguchi¹, Tohru Honda¹, Akito Kuramata³, Shigenobu Yamakoshi³, Masataka Higashiwaki² (1.Kogakuin Univ., 2.NICT, 3.Tamura Corp.)

Keywords:Gallium Oxide, optical property, N dope

Cathodoluminescecne spectra of N-doped β-Ga₂O₃ epitaxial films are shown to investigate their electronic structure and defect states.