[20p-P6-1~29] 15.4 III-V-group nitride crystals

[20p-P6-23] Study of surface states on single-crystalline GaN layer (Ⅲ)

〇Ai Mizuno¹, Reo Suzuki¹, Tsubasa Yoshimura¹, Wataru Watanabe¹, Ki Ando¹, Hiroyuki Shinoda¹, Nobuki Mutsukura¹ (1.School of Engineering, Tokyo Denki Univ.)

Keywords:GaN layer, XPS, TDS

Recently, our group has demonstrated the thermal desorption and the chemical states of oxygen on the surface of GaN layer. In this work, we investigate the influence of air exposure time on the surface states using thermal desorption spectrometry (TDS) and X-ray photoelectron spectroscopy (XPS).