[20p-P6-1~29] 15.4 III-V-group nitride crystals

[20p-P6-25] Study on Fabrication and Evaluation of GaN thin films by RF Magnetron Sputtering

〇Toru Nakajima¹, Hiroshi Kuroda¹, Yuuki Sato¹, Tadashi Ohachi¹, Shinzo Yoshikado¹, Kikuro Takemoto², Hiroyuki Uno², Naoto Kimura², Masanori Takasaki² (1.Doshisha Univ., 2.Yamanaka Hutech Corporation)

Keywords:Gallium Nitride, Radio Frequency Magnetron Sputtering