Yuya Yamashita

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 9:00 AM - 11:45 AM B11 (B11)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[20a-B11-1~10] 8.1 Plasma production and diagnostics

9:15 AM - 9:30 AM

△ [20a-B11-2] The excited-state distribution analysis of the low-pressure microwave discharge argon plasma for electron energy distribution function diagnosis by optical emission spectroscopic measurement

〇Yuya Yamashita¹, Hiroshi Akatsuka² (1.TIRI, 2.Tokyo Tech)