Yoshiyuki Nakayama

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 9:30 AM - 11:30 AM PA5 (PA)

Poster presentation
| 8 Plasma Electronics
| 8.3 Plasma nanotechnology

[20a-PA5-1~2] 8.3 Plasma nanotechnology

9:30 AM - 11:30 AM

[20a-PA5-2] Fabrication of InAlN Films by Reactive Sputtering and Reactive Evaporation with Glancing-angle Deposition Scheme

〇Yoshiyuki Nakayama¹, Daisuke Hoshi¹, Yasushi Inoue¹, Osamu Takai² (1.Chiba Inst. Technol, 2.Kanto Gakuin Univ.)