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Poster presentation

8 Plasma Electronics » 8.3 Plasma nanotechnology

[20a-PA5-1~2] 8.3 Plasma nanotechnology

Fri. Sep 20, 2019 9:30 AM - 11:30 AM PA5 (PA)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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9:30 AM - 11:30 AM

[20a-PA5-1] Influences of Substrate Surface Morphology on Isolated Nano-columnar Structures Synthesized by Glancing-angle Sputtering

〇Masahiro Homma¹, Masashi Hosoya¹, Yasushi Inoue¹, Osamu Takai² (1.Chiba Inst. Technol., 2.Kanto Gakuin Univ.)

9:30 AM - 11:30 AM

[20a-PA5-2] Fabrication of InAlN Films by Reactive Sputtering and Reactive Evaporation with Glancing-angle Deposition Scheme

〇Yoshiyuki Nakayama¹, Daisuke Hoshi¹, Yasushi Inoue¹, Osamu Takai² (1.Chiba Inst. Technol, 2.Kanto Gakuin Univ.)

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