Takayuki Kurashige

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 1:45 PM - 4:15 PM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[18p-E304-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:45 PM - 2:00 PM

△ [18p-E304-1] Doping of Aluminum to Poly-Si Thin Films Coated with Alumina Sol Solution by KrF Excimer Laser Irradiation

〇(B)Takayuki Kurashige¹, Kaname Imokawa^1,2, Akira Suwa¹, Daisuke Nakamura¹, Tetsuya Goto³, Hiroshi Ikenoue^1,2 (1.Kyushu Univ., 2.Dept. of Gigaphoton, Kyushu Univ., 3.Tohoku Univ.)

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