Takahide Umeda

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 1:30 PM - 6:15 PM E311 (E311)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[20p-E311-1~17] 15.6 Group IV Compound Semiconductors (SiC)

1:30 PM - 1:45 PM

[20p-E311-1] Peculiarity of Wet Oxidation on C-face 4H-SiC: An EDMR Aspect

〇Takahide Umeda¹, Yohei Kagoyama¹, Kazuteru Tomita¹, Yuta Abe¹, Mitsuo Okamoto², Tetsuo Hatakeyama², Shinsuke Harada² (1.Univ. of Tsukuba, 2.AIST)