Mitsuhiro Omura

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 9:30 AM - 10:30 AM B32 (B32)

Oral presentation
| 8 Plasma Electronics
| 8.8 Plasma Electronics Award Speech

[19a-B32-1~2] 8.8 Plasma Electronics Award Speech

10:00 AM - 10:30 AM

[19a-B32-2] [Plasma Electronics Award Speech] Layer-by-layer etching of LaAlSiO_x

〇Mitsuhiro Omura¹, Kazuhito Furumoto¹, Kazuhisa Matsuda¹, Toshiyuki Sasaki¹, Itsuko Sakai¹, Hisataka Hayashi¹ (1.Toshiba Memory)