TsungEn Lee

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:45 PM - 5:45 PM E305 (E305)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[19p-E305-1~15] 13.3 Insulator technology

5:00 PM - 5:15 PM

▼ [19p-E305-13] Improvement of Si_0.78Ge_0.22 MOS interface properties by using TiN/Y₂O₃ gate stacks with TMA passivation

〇TsungEn Lee¹, Kasidit Toprasertpong¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1.The Univ. of Tokyo)