Masato Koharada

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 1:45 PM - 4:15 PM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[18p-E304-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

3:15 PM - 3:30 PM

△ [18p-E304-7] Stress Evaluation of Wiggling SiN Pattern by using Raman Spectroscopy

〇(M1)Masato Koharada¹, Ryo Yokogawa^1,2, Naomi Sawamoto¹, Kazutoshi Yoshioka¹, Atsushi Ogura¹ (1.Meiji Univ., 2.JSPS Research Fellow DC)