10:45 〜 11:00 ▲ [21a-C310-7] Pre-sputtering Condition for Crystallized Yttria Stabilized Zirconia (YSZ) Film Deposition on Cellulose Nanopaper (CNP) by Reactive Sputtering 〇(M1C)Jyotish Patidar1、Susumu Horita1 (1.JAIST)