Naho Kaneko

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 10:00 AM - 11:45 AM E307 (E307)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[20a-E307-1~6] 7.3 Micro/Nano patterning and fabrication

11:30 AM - 11:45 AM

△ [20a-E307-6] Morphology control of atomic- and nano-scale periodic patterns transcribed on polymer sheet by thermal annealing and excimer light irradiation

〇(B)Naho Kaneko¹, Tomoaki Oga¹, Atsushi Oshima¹, Satoru Kaneko^2,1, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (1.Tokyo Tech. Materials, 2.KISTEC)