WENCHANG YEH

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 9:30 AM - 11:45 AM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[18a-E304-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:45 AM - 11:00 AM

[18a-E304-6] Investigation on Characteristic Variation of Thin-Film Transistor Fabricated on Crystalline Silicon Stripe by µCLBS Method

〇WENCHANG YEH¹, Mitsuki Hirasue¹, Toshiaki Tsuchiya¹ (1.Shimane Univ.)