Haruka Horiguchi

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:45 PM - 5:45 PM E305 (E305)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[19p-E305-1~15] 13.3 Insulator technology

4:45 PM - 5:00 PM

[19p-E305-12] Introduction of Hf-Post Metallization Annealing at GeO₂/Ge interface

〇(M1)Haruka Horiguchi¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.TAT)