Takashi Fukatani

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:30 PM - 5:00 PM B11 (B11)

Symposium (Oral)
| Symposium (technical)
| Interfacial Nano Electrochemistry - Diversification of Semiconductor Wet Process

[19p-B11-1~8] Interfacial Nano Electrochemistry - Diversification of Semiconductor Wet Process

2:45 PM - 3:00 PM

[19p-B11-4] Elucidation of saw marks flattening mechanism in Si etching using HF/HNO₃

〇Takashi Fukatani¹, Takashi Oinoue¹, Suguru Saito¹, Yoshiya Hagimoto¹, Hayato Iwamoto¹ (1.Sony Semiconductor Solutions)