Noriko Miura

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:45 PM - 5:15 PM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19p-E304-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:45 PM - 3:00 PM

[19p-E304-5] Characteristics of H₂-Syntering Process Using Minimal Focused Light Heating Furnace

〇Noriko Miura^1,2, Kazushige Sato¹, Fumito Imura^1,3, Takeshi Yamada^1,2, Takeshi Aizawa^1,2, Shinichi Ikeda^1,3, Yuuki Ishida^1,3, Yasuhiro Onishi^1,2, Sommawan Khumpuang^1,3, Shiro Hara^1,3 (1.MINIMAL, 2.YONEKURA, 3.AIST)