1:45 PM - 2:00 PM
〇Hiroyuki Tanaka1,2, Kazuhiro Koga2, Hisato Ogiso1,2, Shizuka Nakano1,2, Shunichiro Shimbori2,3, Chikatsu Iwase2,3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.SUNYOU)
Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Thu. Sep 19, 2019 1:45 PM - 5:15 PM E304 (E304)
Kuniyuki Kakushima(Tokyo Tech), Hitoshi Habuka(Yokohama Natl. Univ.)
△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above
1:45 PM - 2:00 PM
〇Hiroyuki Tanaka1,2, Kazuhiro Koga2, Hisato Ogiso1,2, Shizuka Nakano1,2, Shunichiro Shimbori2,3, Chikatsu Iwase2,3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.SUNYOU)
2:00 PM - 2:15 PM
〇ShuJun YE1, Kikuo YAMABE1, Tetsuo ENDOH1 (1.Tohoku Univ.)
2:15 PM - 2:30 PM
〇Daisuke Ohori1, Shuichi Noda2, Yoshiyuki Nozawa3, Bryan Liao3, Ryusuke Fujii3, Toshihiro Hayami3, Mikio Kadoi4, Teruhisa Ishida5, Mami Tanaka5, Masahiro Sota5, Kazuhiko Endo1,2, Seiji Samukawa1,2 (1.IFS, Tohoku Univ., 2.AIST, 3.SPT Co., Ltd., 4.LTJ Corp., 5.NAGASE & CO., LTD.)
2:30 PM - 2:45 PM
〇kazushige sato1,3, Kazuhiro Koga1, Shuichi Noda1,2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST, 3.Sakaguchi E.H VOC Corp.)
2:45 PM - 3:00 PM
〇Noriko Miura1,2, Kazushige Sato1, Fumito Imura1,3, Takeshi Yamada1,2, Takeshi Aizawa1,2, Shinichi Ikeda1,3, Yuuki Ishida1,3, Yasuhiro Onishi1,2, Sommawan Khumpuang1,3, Shiro Hara1,3 (1.MINIMAL, 2.YONEKURA, 3.AIST)
3:00 PM - 3:15 PM
〇Koichi Morikawa1, Shogo Okamoto1, Hiroyuki Shindo1, Somawan Khumpuang2, Shiro Hara2 (1.JAXA, 2.AIST)
3:15 PM - 3:30 PM
〇Masashi Kase1, Kazuhiro Koga2, Shuhei Nakamichi2, Akinori Ihara2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
3:45 PM - 4:00 PM
〇Toshihiro Takeshita1, Sommawan Kumpuang1,2, Shiro Hara1,2, Takeshi Kobayashi1 (1.AIST, 2.MINIMAL)
4:00 PM - 4:15 PM
〇Kazuhiro Koga1, Koichi Morikawa2, Masashi Kase3, Kazushige Sato1, Sommawan Khumpuang1,3, Shiro Hara1,3 (1.MINIMAL, 2.JAXA, 3.AIST)
4:15 PM - 4:30 PM
〇Fumito Imura1,2, Michihiro Inoue1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.Minimal Fab)
4:30 PM - 4:45 PM
〇Kazumasa Nemoto1, Takashi Yajima1, Hiroyuki Tanaka1, Shuichi Noda1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.minimal)
4:45 PM - 5:00 PM
〇Shuichi Noda1, Kazuhiro Koga2, Kazumasa Nemoto1, Yuuki Yabuta3, Naoko Yamamoto3, Ryuichiro Kamei3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.Seinan-kogyo)
5:00 PM - 5:15 PM
〇Takashi Yajima1,2, Noriko Miura2, Masaharu Yasui1,2, Sommawan Khumpuang1,2, Hitoshi Maekawa1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
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