ShuJun YE

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:45 PM - 5:15 PM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19p-E304-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:00 PM - 2:15 PM

▲ [19p-E304-2] Variance reduction during the fabrication of 1x-nm-diameter Si pillar arrays

〇ShuJun YE¹, Kikuo YAMABE¹, Tetsuo ENDOH¹ (1.Tohoku Univ.)