kazushige sato

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:45 PM - 5:15 PM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19p-E304-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:30 PM - 2:45 PM

[19p-E304-4] Preliminary Examination of Resist Patterning toward Realization of 0.5 μm Design Rule in Minimal Fab

〇kazushige sato^1,3, Kazuhiro Koga¹, Shuichi Noda^1,2, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST, 3.Sakaguchi E.H VOC Corp.)