Toshihiro Takeshita

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:45 PM - 5:15 PM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19p-E304-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

3:45 PM - 4:00 PM

[19p-E304-8] Fabrication of ultra-thin silicon chip using Minimal Fab

〇Toshihiro Takeshita¹, Sommawan Kumpuang^1,2, Shiro Hara^1,2, Takeshi Kobayashi¹ (1.AIST, 2.MINIMAL)