Fabrication of ultra-thin silicon chip using Minimal Fab

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Thu. Sep 19, 2019 1:45 PM - 5:15 PM E304 (E304)

Kuniyuki Kakushima(Tokyo Tech), Hitoshi Habuka(Yokohama Natl. Univ.)

3:45 PM - 4:00 PM

〇Toshihiro Takeshita¹, Sommawan Kumpuang^1,2, Shiro Hara^1,2, Takeshi Kobayashi¹ (1.AIST, 2.MINIMAL)

Keywords:Minimal Fab, FHE, MEMS