Koichi Morikawa

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:45 PM - 5:15 PM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19p-E304-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

3:00 PM - 3:15 PM

[19p-E304-6] Fabrication of Integrated Circuit by Minimal SOI CMOS process

〇Koichi Morikawa¹, Shogo Okamoto¹, Hiroyuki Shindo¹, Somawan Khumpuang², Shiro Hara² (1.JAXA, 2.AIST)