Kazuhiro Koga

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:45 PM - 5:15 PM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19p-E304-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

4:00 PM - 4:15 PM

[19p-E304-9] Development of 2-Layer Al Wiring process by Minimal Fab

〇Kazuhiro Koga¹, Koichi Morikawa², Masashi Kase³, Kazushige Sato¹, Sommawan Khumpuang^1,3, Shiro Hara^1,3 (1.MINIMAL, 2.JAXA, 3.AIST)