Kenta Shimpo

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 9:00 AM - 12:15 PM B31 (B31)

Oral presentation
| Joint Session K
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[20a-B31-1~12] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

10:15 AM - 10:30 AM

[20a-B31-6] Crystallinity and electrical properties of Ar+O₂+H₂ sputtered In–Ga–O thin films

〇(M1C)Kenta Shimpo¹, Daichi Koretomo¹, Mamoru Furuta¹, Emi Kawashima², Yuki Tsuruma² (1.Kochi Univ. of Technology, 2.Idemitsu Kosan)