Yuuki Ooe

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Speaker, Author, Co-Author

Sat. Sep 21, 2019 12:45 PM - 4:30 PM B31 (B31)

Oral presentation
| Joint Session K
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[21p-B31-1~14] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

2:00 PM - 2:15 PM

[21p-B31-6] High-aspect ultra-thin Ga₂O₃ nanowall structures with 7nm-width fabricated by Hydrogen environment anisotropic thermal etching of (010) β-Ga₂O₃

〇Yuuki Ooe¹, Yusei Kawasaki¹, Daichi Ito¹, Yuta Moriya¹, Kouki Abe¹, Kentaro Kinoshita¹, Rie Togashi¹, Akihiko Kikuchi^1,2 (1.Sophia Univ, 2.Sophia Photonics Research Center)