Reo Kometani

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 4:00 PM - 6:00 PM PA7 (PA)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20p-PA7-1~8] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

4:00 PM - 6:00 PM

[20p-PA7-5] Research on the surface responsivity of a SnO₂ thin film for the highly sensitive gas sensing

〇Reo Kometani¹, Ryotaro Ueki¹, Penekwong Khemnat¹, Kenta Yoshihara², Shinji Kunori³, Katsuya Ikeda³, Kazuyuki Sashida³, Kenichi Yoshida³, Ichiro Yamada³, Yoshio Mita², Shin-ichi Warisawa¹ (1.Grad. Sch. of Front. Sci., Univ. of Tokyo, 2.Grad. Sch. of Eng., Univ. of Tokyo, 3.Shindengen Elec. Manu. Co., Ltd.)