Kazuma Takahashi

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 9:00 AM - 12:00 PM C212 (C212)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[18a-C212-1~11] 15.7 Crystal characterization, impurities and crystal defects

11:45 AM - 12:00 PM

[18a-C212-11] Impact of heating rate during the melting process for poly-silicon on carbon concentration in Czochralski silicon crystals

〇Kazuma Takahashi¹, Hiroyuki Tsubota¹, Yuta Nagai¹, Yoshiaki Abe¹, Hisashi Matsumura¹ (1.GlobalWafers Japan)