Akihiro Mitsuya

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 9:30 AM - 11:30 AM PA6 (PA)

Poster presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[18a-PA6-1~12] 8.1 Plasma production and diagnostics

9:30 AM - 11:30 AM

[18a-PA6-9] Measurement of ion energy distribution with Faraday cup in dual frequency capacitively-coupled plasma

〇Akihiro Mitsuya¹, Makoto Moriyama¹, Naoya Nakahara¹, Haruka Suzuki¹, Hirotaka Toyoda¹ (1.Nagoya Univ.)